US 12,434,348 B2
Retaining ring having inner surfaces with features
Steven Mark Reedy, San Ramon, CA (US); Simon Yavelberg, Cupertino, CA (US); Jeonghoon Oh, Saratoga, CA (US); Steven M. Zuniga, Soquel, CA (US); Andrew J. Nagengast, Sunnyvale, CA (US); Samuel Chu-Chiang Hsu, Palo Alto, CA (US); and Gautam Shashank Dandavate, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 6, 2024, as Appl. No. 18/736,281.
Application 18/736,281 is a division of application No. 17/945,932, filed on Sep. 15, 2022, granted, now 12,048,981.
Application 16/708,287 is a division of application No. 14/992,763, filed on Jan. 11, 2016, granted, now 10,500,695, issued on Dec. 10, 2019.
Application 17/945,932 is a continuation of application No. 16/708,287, filed on Dec. 9, 2019, granted, now 11,453,099, issued on Sep. 27, 2022.
Claims priority of provisional application 62/168,578, filed on May 29, 2015.
Prior Publication US 2024/0316723 A1, Sep. 26, 2024
Int. Cl. B24B 37/32 (2012.01); H01L 21/687 (2006.01)
CPC B24B 37/32 (2013.01) [H01L 21/68721 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A retaining ring comprising:
an annular body including
a top surface configured to be secured to a carrier head;
a bottom surface configured to contact a polishing surface;
an outer surface extending from the top surface at an outer top perimeter to the bottom surface at an outer bottom perimeter; and
an inner surface extending from the top surface at an inner top perimeter to the bottom surface at an inner bottom perimeter, the inner surface comprising a plurality of regions spaced angularly around the annular body, wherein the plurality of regions comprise at least first regions and second regions, wherein each of the first regions is tilted at a first tilt angle with respect to the bottom surface, wherein each of the second regions is tilted at a second tilt angle with respect to the bottom surface, and wherein the first tilt angle is different from the second tilt angle.