| CPC B23Q 15/12 (2013.01) [B23Q 17/22 (2013.01); G05B 19/404 (2013.01)] | 11 Claims |
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1. A processing machine comprising:
a first moving part configured to support a first one of a workpiece and a tool via a third moving part;
a first guide configured to guide the first moving part in a first direction with respect to a base;
a first drive source configured to drive the first moving part in the first direction with respect to the base;
a first sensor configured to output a signal corresponding to a first displacement comprising a displacement of the first moving part in the first direction with respect to the base and a first error comprising a displacement of the first moving part in a second direction orthogonal to the first direction with respect to the base;
a second moving part configured to support a second one of the workpiece and the tool;
a second guide configured to guide the second moving part in the second direction with respect to the base;
a second drive source configured to drive the second moving part in the second direction with respect to the base;
a second sensor configured to output a signal corresponding to a second displacement comprising a displacement of the second moving part in the second direction with respect to the base;
a third guide configured to guide the third moving part in a third direction orthogonal to both the first and second directions with respect to the first moving part;
a third drive source configured to drive the third moving part in the third direction with respect to the first moving part; and
a control device comprising a processor and a non-transitory memory, the control device configured to control the first drive source, the second drive source, and the third drive source according to a program which includes information about instructions relating to movement of the first moving part, the second moving part and the third drive source, wherein
the non-transitory memory comprises instructions that, when executed by the processor, cause the processor to perform processing providing:
an interpolation unit configured to compute, based on the information of the program, a first target position for the first moving part in the first direction for each predetermined control cycle, a second target position for the second moving part in the second direction for each predetermined control cycle and a third target position for the third moving part in the third direction for each predetermined control cycle,
a first control unit configured to acquire, in each control cycle, a detection value of the first displacement which is up-close based on the signal from the first sensor, compute a first deviation based on a difference between the detection value acquired and the first target position, and control the first drive source so that the first deviation is reduced,
a second control unit configured to acquire, in each control cycle, a detection value of the second displacement which is up-close based on the signal from the second sensor, compute a second deviation based on a difference between the detection value acquired and the second target position, and control the second drive source so that the second deviation is reduced, and
a third control unit configured to control, in each control cycle, the third drive source based on a detection position of the third moving part and the third target position, and
the second control unit is configured to acquire, in each control cycle, a detection value of the first error which is up-close based on the signal from the first sensor, and increase or reduce the second deviation based on the detection value of the first error, without consideration of a detection value of a third error comprising a displacement of the third moving part in the second direction with respect to the first moving part which is up-close, so that at least a portion of an error in a relative position of the workpiece and the tool in the second direction originating from the first error is cancelled by movement of the second moving part in the second direction.
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