US 12,434,331 B2
Laser forming non-square edges in transparent workpieces using modified airy beams
Anping Liu, Horseheads, NY (US); and Craig John Mancusi Ungaro, Corning, NY (US)
Assigned to Corning Incorporated, Corning, NY (US)
Filed by CORNING INCORPORATED, Corning, NY (US)
Filed on Aug. 17, 2021, as Appl. No. 17/403,998.
Claims priority of provisional application 63/077,200, filed on Sep. 11, 2020.
Claims priority of application No. 2026552 (NL), filed on Sep. 28, 2020.
Prior Publication US 2022/0080531 A1, Mar. 17, 2022
Int. Cl. B23K 26/53 (2014.01); B23K 26/06 (2014.01); B23K 26/0622 (2014.01); B23K 26/073 (2006.01); B23K 26/18 (2006.01); B23K 103/00 (2006.01)
CPC B23K 26/53 (2015.10) [B23K 26/0622 (2015.10); B23K 26/0648 (2013.01); B23K 26/073 (2013.01); B23K 26/18 (2013.01); B23K 2103/54 (2018.08)] 16 Claims
OG exemplary drawing
 
1. A method comprising directing a laser beam onto a phase-adjustment device such that the laser beam downstream the phase-adjustment device comprises a modified Airy beam having a modified Airy beam focal region comprising a main lobe and a plurality of side lobes, wherein the main lobe comprises a lobe aspect ratio of 1.2 or greater, and wherein the phase-adjustment device comprises a phase modulation function Ø=(αk)3(x3+(αyy)3), where α is a frequency of phase

OG Complex Work Unit Math
modulation where λ is a wavelength of the laser beam, x and y are spatial coordinates of the phase-adjustment device, and αy is a phase modulation frequency ratio which is 0.8 or less.