| CPC B08B 3/022 (2013.01) [B08B 3/024 (2013.01); B08B 13/00 (2013.01); B08B 3/02 (2013.01); B08B 5/02 (2013.01); B08B 2203/02 (2013.01)] | 20 Claims |

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1. A cleaning apparatus for cleaning a workpiece, comprising:
a support table configured to rotate about a first axis that extends horizontally, the support table having a first surface and a second surface on an opposite side of the support table, the support table having a first through hole that passes through the support table from the first surface to the second surface in a direction of a second axis that is perpendicular to the first axis and perpendicular to the first and second surfaces;
a cleaning table on which the workpiece is to be installed, the cleaning table being rotatably supported by the support table so as to be rotatable about the second axis, the cleaning table having a second through hole extending therethrough in a direction of the second axis, the second through hole being aligned with the first through hole along the second axis such that substantially the entirety of an installation surface of the workpiece will be exposed through the first and second through holes when the workpiece is mounted to the cleaning table;
a nozzle base configured to move in a lateral direction, a front-rear direction, and a vertical direction relative to the support table; and
a nozzle disposed on the nozzle base in a rotatable manner about a nozzle rotational axis extending in the vertical direction.
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