US 12,434,186 B2
Method for purification of electronic gases and a purification device for the method
Po-Wei Huang, Hsinchu (TW)
Assigned to TRONIC PURITY, INC., Hsinchu (TW)
Filed by Tronic Purity, Inc., Hsinchu (TW)
Filed on Sep. 14, 2022, as Appl. No. 17/944,230.
Prior Publication US 2024/0082780 A1, Mar. 14, 2024
Int. Cl. B01D 53/22 (2006.01); B01D 65/02 (2006.01); B01D 69/08 (2006.01)
CPC B01D 53/22 (2013.01) [B01D 53/226 (2013.01); B01D 65/02 (2013.01); B01D 69/08 (2013.01); B01D 2053/224 (2013.01); B01D 2256/10 (2013.01); B01D 2257/104 (2013.01); B01D 2257/108 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A purification device, comprising:
a gas cylinder with a front opening and a rear opening;
a gas purification assembly positioned inside the gas cylinder and comprising at least a purification material body in which a bunch of hollow fiber tubes are filled;
a front cover body covered on the front opening of the gas cylinder and comprising a front gas port thereon as well as a front sintered metal filter with multiple front gas vents at an inner side of the front cover body, wherein a front gas flowing space is formed between the front gas port and the front sintered metal filter, and a front space is formed between the front sintered metal filter and one end of the purification material body; and
a rear cover body covered on the rear opening of the gas cylinder and comprising a rear gas port thereon as well as a rear sintered metal filter with multiple rear gas vents at an inner side of the rear cover body, wherein a rear gas flowing space is formed between the rear gas port and the rear sintered metal filter, a rear space is formed between the rear sintered metal filter and the other end of the purification material body, and the rear gas vent features its bore diameter less than bore diameter of the front gas vent.