US 12,108,678 B2
Hybrid structure for a surface acoustic wave device
Oleg Kononchuk, Theys (FR); Eric Butaud, Grenoble (FR); and Eric Desbonnets, Lumbin (FR)
Assigned to SOITEC, Bernin (FR)
Filed by Soitec, Bernin (FR)
Filed on Jan. 31, 2022, as Appl. No. 17/649,470.
Application 17/649,470 is a continuation of application No. 16/072,587, granted, now 11,335,847, previously published as PCT/FR2017/050092, filed on Jan. 17, 2017.
Claims priority of application No. 1650774 (FR), filed on Feb. 1, 2016.
Prior Publication US 2022/0158080 A1, May 19, 2022
Int. Cl. H01L 41/08 (2006.01); H03H 3/02 (2006.01); H03H 9/00 (2006.01); H03H 9/02 (2006.01); H10N 30/00 (2023.01); H10N 30/072 (2023.01)
CPC H10N 30/072 (2023.02) [H03H 3/02 (2013.01); H03H 9/0009 (2013.01); H03H 9/02047 (2013.01); H03H 9/02574 (2013.01); H10N 30/708 (2024.05)] 17 Claims
OG exemplary drawing
 
1. A hybrid structure for a surface acoustic wave device, comprising:
a carrier substrate;
a useful layer of piezoelectric material joined to the carrier substrate, the useful layer having a thermal expansion coefficient higher than that of the carrier substrate; and
an intermediate layer between the useful layer and the carrier substrate, the intermediate layer comprising a structured layer including at least two different materials having a plurality of periodic motifs in a plane of the intermediate layer.