CPC H10B 51/20 (2023.02) [H01L 29/7827 (2013.01); H01L 29/78391 (2014.09); H01L 29/78642 (2013.01); H01L 29/78696 (2013.01); H01L 29/7889 (2013.01); H10B 51/10 (2023.02)] | 5 Claims |
1. A nonvolatile memory device comprising:
a substrate having an upper surface;
a gate structure disposed over the substrate, the gate structure comprising at least one gate electrode layer pattern and at least one gate insulation layer pattern, which are alternately stacked along a first direction perpendicular to the upper surface, wherein the gate structure extends in a second direction perpendicular to the first direction;
a ferroelectric layer disposed over the substrate and disposed on at least a portion of one sidewall surface of the gate structure, wherein the one sidewall surface of the gate structure forms a plane substantially parallel to the first and second directions;
a channel layer disposed over the substrate and disposed on the ferroelectric layer;
a source electrode structure and a drain electrode structure, spaced apart from each other in the second direction, each disposed over the substrate and disposed to contact the channel layer;
an insulation structure disposed between the source electrode structure and the drain electrode structure, the insulation structure disposed to contact the channel layer and extending in the first direction; and
a non-ferroelectric first interfacial insulation layer disposed between the ferroelectric layer and the channel layer.
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