US 12,108,606 B2
Nonvolatile memory device having a ferroelectric layer
Jae Hyun Han, Icheon-si (KR); Jae Gil Lee, Seoul (KR); Hyangkeun Yoo, Seongnam-si (KR); and Se Ho Lee, Yongin-si (KR)
Assigned to SK hynix inc., Icheon-si (KR)
Filed by SK hynix Inc., Icheon-si (KR)
Filed on Aug. 22, 2022, as Appl. No. 17/892,514.
Application 17/892,514 is a division of application No. 16/891,544, filed on Jun. 3, 2020, granted, now 11,456,318.
Claims priority of application No. 10-2019-0163139 (KR), filed on Dec. 9, 2019.
Prior Publication US 2022/0399371 A1, Dec. 15, 2022
Int. Cl. H10B 51/20 (2023.01); H01L 29/78 (2006.01); H01L 29/786 (2006.01); H01L 29/788 (2006.01); H10B 51/10 (2023.01)
CPC H10B 51/20 (2023.02) [H01L 29/7827 (2013.01); H01L 29/78391 (2014.09); H01L 29/78642 (2013.01); H01L 29/78696 (2013.01); H01L 29/7889 (2013.01); H10B 51/10 (2023.02)] 5 Claims
OG exemplary drawing
 
1. A nonvolatile memory device comprising:
a substrate having an upper surface;
a gate structure disposed over the substrate, the gate structure comprising at least one gate electrode layer pattern and at least one gate insulation layer pattern, which are alternately stacked along a first direction perpendicular to the upper surface, wherein the gate structure extends in a second direction perpendicular to the first direction;
a ferroelectric layer disposed over the substrate and disposed on at least a portion of one sidewall surface of the gate structure, wherein the one sidewall surface of the gate structure forms a plane substantially parallel to the first and second directions;
a channel layer disposed over the substrate and disposed on the ferroelectric layer;
a source electrode structure and a drain electrode structure, spaced apart from each other in the second direction, each disposed over the substrate and disposed to contact the channel layer;
an insulation structure disposed between the source electrode structure and the drain electrode structure, the insulation structure disposed to contact the channel layer and extending in the first direction; and
a non-ferroelectric first interfacial insulation layer disposed between the ferroelectric layer and the channel layer.