US 12,108,169 B2
Spectral filter, and image sensor and electronic device including the spectral filter
Hyochul Kim, Suwon-si (KR); Jaesoong Lee, Suwon-si (KR); and Younggeun Roh, Suwon-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jan. 6, 2023, as Appl. No. 18/094,044.
Claims priority of application No. 10-2022-0002351 (KR), filed on Jan. 6, 2022.
Prior Publication US 2023/0217122 A1, Jul. 6, 2023
Int. Cl. H04N 25/13 (2023.01); G01J 3/26 (2006.01); G02B 5/20 (2006.01); G02B 5/26 (2006.01); G02B 5/28 (2006.01); H01L 27/146 (2006.01); H04N 25/11 (2023.01)
CPC H04N 25/13 (2023.01) [G02B 5/201 (2013.01); G02B 5/26 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A spectral filter comprising a plurality of filter arrays each including a plurality of unit filters having different center wavelengths from each other,
wherein each of the plurality of unit filters comprises:
a first metal reflection layer and a second metal reflection layer which are disposed to be apart from each other;
a cavity including a first pattern and being arranged between the first metal reflection layer and the second metal reflection layer; and
a lower pattern film being disposed under the first metal reflection layer and including a second pattern,
wherein, in unit filters having a same center wavelength in each of the plurality of unit filters corresponding to the plurality of filter arrays, the first pattern of the cavity and the second pattern of the lower pattern film vary according to a position of the unit filters having the same center wavelength to compensate for a center wavelength shift caused by a change in a chief ray angle of incident light.