US 12,107,058 B2
Split RDL connection between die and UBM
Jian Zuo, Singapore (SG); and Yaojian Lin, Jiangyin (CN)
Assigned to STATS ChipPAC Pte. Ltd., Singapore (SG)
Filed by STATS ChipPAC Pte. Ltd., Singapore (SG)
Filed on Aug. 18, 2021, as Appl. No. 17/445,330.
Prior Publication US 2023/0056780 A1, Feb. 23, 2023
Int. Cl. H01L 23/00 (2006.01)
CPC H01L 24/05 (2013.01) [H01L 24/03 (2013.01); H01L 24/06 (2013.01); H01L 2224/03011 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05082 (2013.01); H01L 2224/05569 (2013.01); H01L 2224/06515 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A method of making a semiconductor device, comprising:
providing a semiconductor die;
forming a conductive layer over the semiconductor die;
patterning the conductive layer to form a first contact pad, a second contact pad, and a third contact pad;
forming a buffer conductive layer between the semiconductor die and first contact pad; and
forming an under-bump metallization layer (UBM) directly on and physically contacting the first contact pad and second contact pad, wherein the UBM electrically connects the first contact pad to the second contact pad and the third contact pad is electrically isolated from the UBM.