	US 12,107,017 B2
	Method and apparatus for producing at least one modification in a solid body
Ralf Rieske, Dresden (DE); Marko Swoboda, Dresden (DE); and Albrecht Ullrich, Dresden (DE)
Assigned to INFINEON TECHNOLOGIES AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Dec. 7, 2022, as Appl. No. 18/076,763.
Application 18/076,763 is a continuation of application No. 16/856,258, filed on Apr. 23, 2020, granted, now 11,551,981.
Claims priority of application No. 102019205847.7 (DE), filed on Apr. 24, 2019.
Prior Publication US 2023/0093945 A1, Mar. 30, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/66 (2006.01); H01L 21/268 (2006.01); H01L 21/78 (2006.01)

CPC H01L 22/12 (2013.01) [H01L 21/268 (2013.01); H01L 21/7806 (2013.01); H01L 22/20 (2013.01)]

20 Claims

1. A method for producing modifications in the interior of a solid body, the method comprising:

providing the solid body, wherein the solid body has a first surface, wherein a thickness of the solid body is a function of a lateral position along the first surface;

exposing a volume portion of the solid body to light waves of different wavelengths via the first surface, wherein the light waves are partly reflected at the first surface;

at least partly acquiring light parameters of the reflected light waves, of the light waves, by means of a sensor device;

ascertaining distance information from at least a portion of the acquired light parameters;

introducing laser radiation into the volume portion of the solid body via the first surface to produce at least one modification in the interior of the solid body, wherein at least one laser parameter of the laser radiation is set at least depending on the distance information of the portion;

exposing, at least after the production of the at least one modification in the interior of the solid body, the volume portion of the solid body to at least one of the light waves of different wavelengths or to second light waves of different wavelengths via the first surface, wherein at least one of the light waves or the second light waves are partly reflected at the first surface and are partly coupled into the solid body and reflected at the at least one modification;

at least partly acquiring second light parameters of second reflected light waves, of at least one of the light waves or the second light waves, by means of at least one of the sensor device or a second sensor device;

ascertaining location information from at least a portion of the acquired second light parameters; and

determining, based upon the location information, a first distance between the at least one modification and the first surface.