US 12,106,976 B2
Steam-assisted single substrate cleaning process and apparatus
Jianshe Tang, San Jose, CA (US); Wei Lu, Fremont, CA (US); Haosheng Wu, Santa Clara, CA (US); Taketo Sekine, Santa Clara, CA (US); Shou-Sung Chang, Mountain View, CA (US); Hari N. Soundararajan, Sunnyvale, CA (US); and Chad Pollard, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 23, 2023, as Appl. No. 18/213,717.
Application 18/213,717 is a division of application No. 17/141,622, filed on Jan. 5, 2021, granted, now 11,728,185.
Prior Publication US 2023/0335418 A1, Oct. 19, 2023
Int. Cl. H01L 21/67 (2006.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01); B08B 3/12 (2006.01); B08B 5/02 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01)
CPC H01L 21/67051 (2013.01) [B08B 3/024 (2013.01); B08B 3/08 (2013.01); B08B 3/12 (2013.01); B08B 5/02 (2013.01); H01L 21/02057 (2013.01); H01L 21/30625 (2013.01); B08B 2203/007 (2013.01); B08B 2230/01 (2013.01); H01L 21/02074 (2013.01); H01L 21/67109 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of cleaning a substrate comprising:
rotating a substrate disposed on a substrate support;
spraying a front side of the substrate using steam through a front side nozzle assembly;
spraying a back side of the substrate using steam through a back side dispenser assembly; and
dispensing a heated chemical over the front side of the substrate comprising mixing the heated chemical and a nitrogen gas in a chemical heating and dispensing nozzle (POU nozzle).