US 12,106,951 B2
Mass analysis system, and method for determining performance of mass analysis device
Yuka Sumigama, Tokyo (JP); Yuichiro Hashimoto, Tokyo (JP); Hiroyuki Yasuda, Tokyo (JP); and Masuyuki Sugiyama, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 17/599,231
Filed by HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
PCT Filed Mar. 12, 2020, PCT No. PCT/JP2020/010709
§ 371(c)(1), (2) Date Sep. 28, 2021,
PCT Pub. No. WO2020/203134, PCT Pub. Date Oct. 8, 2020.
Claims priority of application No. 2019-072798 (JP), filed on Apr. 5, 2019.
Prior Publication US 2022/0189755 A1, Jun. 16, 2022
Int. Cl. H01J 49/00 (2006.01); G01N 27/62 (2021.01); H01J 49/10 (2006.01)
CPC H01J 49/0036 (2013.01) [G01N 27/62 (2013.01); H01J 49/0009 (2013.01); H01J 49/10 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A mass analysis system, comprising:
an ion source configured to ionize a measurement sample,
a detector configured to generate an electrical signal in response to detecting ions from the measurement sample;
an analog calculation unit configured to calculate a first measured value based on an intensity and an area of a pulse in the electric signal generated by the detector;
a pulse counting unit configured to obtain a second measured value by counting a number of pulses of the electric signal generated by the detector; and
a processor that is communicatively coupled to the analog calculation unit and the pulse counting unit, wherein the processor is configured to:
receive the first measured value from the analog calculation unit,
receive the second measured value from the pulse counting unit,
calculate an A/P ratio indicating a ratio of the first measured value to the second measured value,
perform a comparison of the A/P ratio with a threshold,
determine that the detector has deteriorated and is no longer acceptable based on the comparison, and
determine that another component of the mass analysis system is contaminated by applying the A/P ratio to the first measured value to produce an adjusted value and comparing the adjusted value to the second measured value, wherein the another component is different from the detector.