US 12,106,940 B2
Systems and methods for storage and supply of F3NO-free FNO gases and F3NO-free FNO gas mixtures for semiconductor processes
Ayaka Nishiyama, Tsukuba (JP); Jiro Yokota, Tsukuba (JP); Chih-yu Hsu, Tsukuba (JP); Peng Shen, Tsukuba (JP); and Nathan Stafford, Bear, DE (US)
Assigned to L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris (FR)
Filed by L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris (FR)
Filed on Jan. 13, 2022, as Appl. No. 17/575,049.
Application 17/575,049 is a division of application No. 16/227,623, filed on Dec. 20, 2018, abandoned.
Prior Publication US 2022/0208517 A1, Jun. 30, 2022
Int. Cl. H01J 37/32 (2006.01); C01B 21/084 (2006.01); C09K 13/00 (2006.01); H01L 21/311 (2006.01); H01L 21/67 (2006.01)
CPC H01J 37/3244 (2013.01) [C01B 21/0844 (2013.01); C09K 13/00 (2013.01); H01J 37/32467 (2013.01); H01L 21/31116 (2013.01); H01L 21/67069 (2013.01); C01P 2002/82 (2013.01); C01P 2006/80 (2013.01); H01J 2237/006 (2013.01); H01J 2237/334 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A method for storage and supply of a F3NO-free FNO-containing gas, the method comprising the steps of:
storing the F3NO-free FNO-containing gas in a NiP coated steel cylinder with a polished inner surface;
adding additional F2 to the F3NO-free FNO-containing gas to suppress the formation of F3NO in the F3NO-free FNO-containing gas;
passivating a manifold assembly with FNO;
releasing the F3NO-free FNO-containing gas from the cylinder to the manifold assembly by activating a cylinder valve in fluid communication with the cylinder and the manifold assembly;
de-pressurizing the F3NO-free FNO-containing gas by activating a pressure regulator in the manifold assembly so as to divide the manifold assembly into a first pressure zone upstream of the pressure regulator and a second pressure zone downstream of the pressure regulator; and
feeding the de-pressurized F3NO-free FNO-containing gas to a target reactor downstream of the second pressure zone.