CPC H01J 37/08 (2013.01) [H01J 37/16 (2013.01); H01J 2237/022 (2013.01); H01J 2237/166 (2013.01); H01J 2237/1825 (2013.01); H01J 2237/186 (2013.01)] | 18 Claims |
1. A gas replacement apparatus, the gas replacement apparatus comprising:
an ion chamber, the ion chamber including a housing enclosing a gas and an electrode, the housing including,
a first hermetically sealed chamber enclosing a first portion of the gas, and
a second hermetically sealed chamber enclosing a second portion of the gas; and
a valve assembly including a first valve and a second valve, the first valve being coupled to the first hermetically sealed chamber and the second valve being coupled to the second hermetically sealed chamber.
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