US 12,106,925 B2
Cyclotron having continuously variable energy output
Frank Sinclair, Hartland, ME (US); Klaus Becker, Kensington, NH (US); Joseph C. Olson, Beverly, MA (US); Tseh-Jen Hsieh, Rowley, MA (US); Morgan Patrick Dehnel, Nelson (CA); and Anand Mathai George, Kerala (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 23, 2021, as Appl. No. 17/560,632.
Prior Publication US 2023/0207247 A1, Jun. 29, 2023
Int. Cl. H01J 27/18 (2006.01); H01J 27/02 (2006.01)
CPC H01J 27/028 (2013.01) [H01J 27/18 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a cyclotron to receive an ion beam as an incident ion beam at an initial energy, and to output the ion beam as an accelerated ion beam at an accelerated ion energy;
an RF source to output an RF power signal to the cyclotron, the RF power source comprising a variable power amplifier; and
a movable stripper, translatable to intercept the ion beam within the cyclotron at a continuum of different positions;
wherein the RF power signal comprises a composite signal that comprises a first signal having a first frequency and a second signal having a second frequency, the second frequency being an odd harmonic of the first frequency.