US 12,106,783 B2
Microwave-assisted magnetic recording (MAMR) head slider with diamoind-like carbon layer and a silicon nitride layer, and related head gimbal assembly and disk drive unit
Da Yao He, Hong Kong (CN); Rong Huang, Hong Kong (CN); Hua Li, Hong Kong (CN); Jian Hui Huang, Hong Kong (CN); and Peng Liu, Hong Kong (CN)
Assigned to SAE Magnetics (H.K.) Ltd., Hong Kong (CN)
Filed by SAE Magnetics (H.K.) Ltd., Hong Kong (CN)
Filed on Jul. 6, 2023, as Appl. No. 18/348,073.
Claims priority of application No. 202210793047.2 (CN), filed on Jul. 7, 2022.
Prior Publication US 2024/0013804 A1, Jan. 11, 2024
Int. Cl. G11B 5/255 (2006.01); G11B 5/31 (2006.01); G11B 5/40 (2006.01); G11B 5/00 (2006.01); G11B 5/48 (2006.01)
CPC G11B 5/255 (2013.01) [G11B 5/3106 (2013.01); G11B 5/40 (2013.01); G11B 2005/0021 (2013.01); G11B 2005/0024 (2013.01); G11B 5/4826 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device with a protective layer, comprising:
a substrate;
a seed layer formed on the substrate; and
a diamond-like carbon (DLC) layer formed on the seed layer, wherein
the seed layer is a silicon nitride (SiN) layer, and a content of nitrogen in the silicon nitride layer is 9%-17%;
wherein the silicon nitride layer has a first interface adjacent to the diamond-like carbon layer and a second interface adjacent to the substrate, and a content of nitrogen on the second interface is greater than a content of nitrogen on the first interface.