US 12,105,419 B2
Salt, quencher, resist composition and method for producing resist pattern
Katsuhiro Komuro, Osaka (JP); Yuki Takahashi, Osaka (JP); and Koji Ichikawa, Osaka (JP)
Assigned to SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo (JP)
Filed by SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo (JP)
Filed on May 14, 2020, as Appl. No. 16/874,079.
Claims priority of application No. 2019-093684 (JP), filed on May 17, 2019.
Prior Publication US 2020/0363720 A1, Nov. 19, 2020
Int. Cl. G03F 7/004 (2006.01); C07D 327/08 (2006.01); C07D 339/08 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01); G03F 7/38 (2006.01)
CPC G03F 7/0045 (2013.01) [C07D 327/08 (2013.01); C07D 339/08 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); G03F 7/162 (2013.01); G03F 7/20 (2013.01); G03F 7/30 (2013.01); G03F 7/38 (2013.01)] 13 Claims
 
1. A resist composition comprising:
a quencher comprising an inner salt represented by formula (I),
a resin including a structural unit having an acid-labile group, and
an acid generator including a salt represented by formula (B1),
wherein the resist composition is free of amine and ammonium salt:

OG Complex Work Unit Chemistry
wherein, in formula (I),
R1, R2 and R3 each independently represent a halogen atom, an alkyl fluoride group having 1 to 6 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and —CH2— included in the hydrocarbon group may be replaced by —O— or —CO—,
at least one R1 is a hydroxy group of an alkoxy having 1 to 3 carbon atoms, which is bonded to a meta or para position of a benzene ring with respect to a bonding site of COO—,
m1 represents an integer of 1 to 4, and when m1 is 2 or more, a plurality of R1 may be the same or different from each other,
m2 represents an integer of 0 to 4, and when m2 is 2 or more, a plurality of R2 may be the same or different from each other,
m3 represents an integer of 0 to 4, and when m3 is 2 or more, a plurality of R3 may be the same or different from each other, and X1 represents —O— or —S—,

OG Complex Work Unit Chemistry
wherein, in formula (B1),
Qb1 and Qb2 each independently represent a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms,
Lb1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, —CH2— included in the divalent saturated hydrocarbon group may be replaced by —O— or —CO—, and a hydrogen atom included in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group,
Y represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, and —CH2— included in the alicyclic hydrocarbon group may be replaced by —O—, —S(O)2— or —CO—, and
Z+ represents an organic cation.