| CPC G01N 21/9501 (2013.01) [G02B 7/005 (2013.01); G01N 2021/8845 (2013.01); G02B 2003/0093 (2013.01)] | 18 Claims |
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1. An apparatus for inspecting a substrate, the apparatus comprising:
a stage on which the substrate is configured to be loaded;
a light source configured to extract a first light having a first wavelength from a light having a plurality of wavelengths, and provide the first light to the substrate;
an objective lens disposed on an upper surface of the stage and configured to allow the first light to pass therethrough;
at least one microsphere disposed between the upper surface of the stage and the objective lens, the at least one microsphere configured to allow the first light provided from the objective lens to pass therethrough, and to condense the first light on the substrate;
a detector configured to detect a reflected light formed by the first light reflected from the substrate to inspect the substrate; and
a controller configured to control a position of at least one from among the objective lens and the at least one microsphere in a vertical direction such that the first light is condensed on at least one focal point formed on the substrate,
wherein the controller is further configured to:
acquire information on the first wavelength of the first light extracted by the light source,
acquire first position information on the at least one focal point, which is pre-calculated, based on the first wavelength, and
control the position of at least one from among the objective lens and the at least one microsphere in the vertical direction by using the first position information.
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