US 12,104,906 B2
Chip-level disc-type acousto-optic standing wave gyroscope
Honglong Chang, Xi'an (CN); Lu Tian, Xi'an (CN); Qiang Shen, Xi'an (CN); and Ge Yang, Xi'an (CN)
Assigned to NORTHWESTERN POLYTECHNICAL UNIVERSITY, Xi'an (CN)
Appl. No. 17/641,481
Filed by NORTHWESTERN POLYTECHNICAL UNIVERSITY, Xi'an (CN)
PCT Filed Sep. 30, 2021, PCT No. PCT/CN2021/122064
§ 371(c)(1), (2) Date Mar. 9, 2022,
PCT Pub. No. WO2022/252459, PCT Pub. Date Dec. 8, 2022.
Claims priority of application No. 202110625024.6 (CN), filed on Jun. 4, 2021.
Prior Publication US 2024/0053148 A1, Feb. 15, 2024
Int. Cl. G01C 19/72 (2006.01)
CPC G01C 19/721 (2013.01) 9 Claims
OG exemplary drawing
 
1. A chip-level disc-type acousto-optic standing wave gyroscope comprising a substrate and a gyroscope structure placed on an upper surface of the substrate;
the substrate is in a shape of a circular disc;
the gyroscope structure includes an acoustic wave drive module and an optical detection module, the acoustic wave drive module is arranged in a circular shape taking the center of the circular disc as an origin and extending outward radially, and the optical detection module is arranged in the middle of the acoustic wave drive module and is annular;
the acoustic wave drive module includes an annular interdigitated transducer, a metal electrode layer group uniformly sputtered on the annular interdigitated transducer, annularly arranged metallic pillars and an annular reflection grating, respectively placed in sequence from center of the disk radially to periphery of the disk;
the optical detection module includes a first grating coupler, an optical waveguide at a light source input end, a first coupler, a second coupler, an optical waveguide at a signal output end and a second grating coupler, which are connected in sequence.