a cryocooler;

a cryopanel cooled by the cryocooler;

a cryopump container supporting the cryocooler and accommodating the cryopanel;

a temperature sensor configured to measure a temperature of the cryopanel and output a measured temperature signal indicating the temperature;

a pressure sensor configured to measure an internal pressure of the cryopump container and output a measured pressure signal indicating the internal pressure;

a cryopump controller including a pressure rise rate comparator configured to compare a pressure rise rate of the cryopump container with a first pressure rise rate threshold when the temperature of the cryopanel is in a first temperature zone and the internal pressure of the cryopump container is in a first pressure region, on the basis of the measured temperature signal and the measured pressure signal; and

a cryocooler controller configured to control the cryocooler so as to lower the temperature of the cryopanel from the first temperature zone to a second temperature zone lower than the first temperature zone when the pressure rise rate of the cryopump container falls below the first pressure rise rate threshold,

wherein the pressure rise rate comparator is further configured to compare the pressure rise rate of the cryopump container with a second pressure rise rate threshold when the temperature of the cryopanel is in the second temperature zone and the internal pressure of the cryopump container is in a second pressure region, on the basis of the measured temperature signal and the measured pressure signal, and

wherein the second pressure region is lower than the first pressure region, and the second pressure rise rate threshold is smaller than the first pressure rise rate threshold.