US 12,104,248 B2
Gas feeding cup and a gas manifold assembly
Pekka Soininen, Espoo (FI); Johannes Wesslin, Espoo (FI); and Jonas Andersson, Espoo (FI)
Assigned to BENEQ OY, Espoo (FI)
Filed by BENEQ OY, Espoo (FI)
Filed on Sep. 27, 2023, as Appl. No. 18/475,338.
Application 18/475,338 is a continuation of application No. PCT/FI2022/050201, filed on Mar. 29, 2022.
Claims priority of application No. 20215375 (FI), filed on Mar. 30, 2021.
Prior Publication US 2024/0018651 A1, Jan. 18, 2024
Int. Cl. C23C 16/455 (2006.01)
CPC C23C 16/45544 (2013.01) [C23C 16/45561 (2013.01); C23C 16/45563 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An atomic layer deposition apparatus, comprising:
a fixed gas manifold structure; and
a gas feeding cup removably provided in the fixed gas manifold structure, the gas feeding cup including:
a cup bottom comprising gas feeding channels extending through the cup bottom from a cup bottom outer surface to a cup bottom inner surface on the other side of the cup bottom;
a cup wall surrounding the cup bottom and extending transverse relative to the cup bottom in a direction away from the cup bottom at the inner surface side of the cup bottom such that a gas feeding space is formed by the cup wall and the cup bottom inner surface; and
a gas mixing cone arranged to the gas feeding space, the gas mixing cone is disposed at a distance from the cup bottom inner surface for forming a gas mixing zone between the cup bottom inner surface and the gas mixing cone,
wherein the cup wall extends at least partly in a direction away from the cup bottom at the outer surface side of the cup bottom such that a flange is formed on the opposite side of the cup bottom than the gas feeding space.