US 12,104,245 B2
Compound, thin-film forming raw material that contains said compound, and method of manufacturing thin film
Atsushi Sakurai, Tokyo (JP); Masako Hatase, Tokyo (JP); Masaki Enzu, Tokyo (JP); Keisuke Takeda, Tokyo (JP); Ryota Fukushima, Tokyo (JP); and Atsushi Yamashita, Tokyo (JP)
Assigned to ADEKA CORPORATION, Tokyo (JP)
Appl. No. 17/771,181
Filed by ADEKA CORPORATION, Tokyo (JP)
PCT Filed Oct. 19, 2020, PCT No. PCT/JP2020/039239
§ 371(c)(1), (2) Date Apr. 22, 2022,
PCT Pub. No. WO2021/085210, PCT Pub. Date May 6, 2021.
Claims priority of application No. 2019-199862 (JP), filed on Nov. 1, 2019.
Prior Publication US 2022/0389570 A1, Dec. 8, 2022
Int. Cl. C23C 16/18 (2006.01); C07D 487/10 (2006.01); C07F 1/00 (2006.01); C07F 3/00 (2006.01); C07F 7/22 (2006.01); C07F 13/00 (2006.01); C07F 15/04 (2006.01); C07F 15/06 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/18 (2013.01) [C07D 487/10 (2013.01); C07F 1/005 (2013.01); C07F 3/003 (2013.01); C07F 7/2284 (2013.01); C07F 13/005 (2013.01); C07F 15/045 (2013.01); C07F 15/065 (2013.01); C23C 16/45553 (2013.01)] 5 Claims
 
1. A compound represented by the following formula (1):

OG Complex Work Unit Chemistry
in the formula (1), R1 to R5 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a group containing a fluorine atom, M represents a metal atom, and “n” represents a valence of the metal atom represented by M, provided that R1 and R5 each represent an alkyl group having 1 to 5 carbon atoms, at least one of R2 and R4 represents an alkyl group having 1 to 5 carbon atoms substituted with a fluorine atom, and R3 represents a hydrogen atom.