CPC C23C 14/50 (2013.01) [B05B 1/14 (2013.01); B29C 33/56 (2013.01); B29C 33/58 (2013.01); B29C 33/62 (2013.01); B29D 30/0662 (2013.01); C23C 14/562 (2013.01); C23C 16/30 (2013.01); C23C 16/44 (2013.01); C23C 16/458 (2013.01); C23C 16/54 (2013.01); C23C 16/56 (2013.01); H01L 21/68764 (2013.01); B05D 1/02 (2013.01); B05D 1/60 (2013.01); B05D 5/08 (2013.01); B05D 2518/10 (2013.01)] | 23 Claims |
1. A system for depositing a coating on a surface of a mold, comprising:
a deposition chamber;
a mold support adapted and arranged to support the mold in the deposition chamber;
a gas inlet port adapted and arranged to introduce a gaseous species into the deposition chamber; and
a filament assembly, wherein the filament assembly comprises:
a first frame portion;
a second frame portion;
a third frame portion positioned between and connecting the first frame portion and the second frame portion; and
a plurality of filaments extending between the first frame portion and the second frame portion to form a non-planar filament array,
wherein the gas inlet port is positioned lower than the filament assembly,
wherein the gas inlet port is positioned between a central axis of the filament assembly and the mold,
wherein the filament array, the filament assembly, and the gas inlet port are positioned so to cause the gaseous species to flow in a direction substantially parallel to each of the plurality of filaments in the filament array, and
wherein the gas inlet port and the first frame portion are positioned to cause the gaseous species to flow from the gas inlet port upwards to the first frame portion, laterally across the first frame portion, upwards, and then out of the deposition chamber through a gas outlet port positioned between the mold and the deposition chamber.
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