US 12,104,018 B2
Photocurable polymers, photocurable polymer compositions and lithographic processes including the same
Joel Pollino, Johns Creek, GA (US); Stéphane Jeol, Saint-Genis Laval (FR); Kermit S. Kwan, Cumming, GA (US); Timothy Edward Long, Blacksburg, VA (US); Christopher Bryant Williams, Blacksburg, VA (US); Viswanath Meenakshisundarm, Blacksburg, VA (US); Nicholas Raymond Chartrain, Blacksburg, VA (US); Justin Sirrine, Alpharetta, GA (US); and Katherine V. Heifferon, Christiansburg, VA (US)
Assigned to SOLVAY SPECIALTY POLYMERS USA, LLC, Alpharetta, GA (US); and VIRGINIA TECH INTELLECTUAL PROPERTIES, INC., Blacksburg, VA (US)
Appl. No. 17/283,321
Filed by Solvay Specialty Polymers USA, LLC, Alpharetta, GA (US); and Virginia Tech Intellectual Properties, Inc., Blacksburg, VA (US)
PCT Filed Oct. 1, 2019, PCT No. PCT/EP2019/076661
§ 371(c)(1), (2) Date Apr. 7, 2021,
PCT Pub. No. WO2020/074332, PCT Pub. Date Apr. 16, 2020.
Claims priority of provisional application 62/743,756, filed on Oct. 10, 2018.
Prior Publication US 2022/0002491 A1, Jan. 6, 2022
Int. Cl. C08G 75/23 (2006.01); B29C 64/135 (2017.01); B33Y 70/00 (2020.01); B33Y 10/00 (2015.01)
CPC C08G 75/23 (2013.01) [B29C 64/135 (2017.08); B33Y 70/00 (2014.12); B33Y 10/00 (2014.12)] 15 Claims
 
1. A polymer formulation (F) comprising, based on the total weight of the formulation (F):
from 1 to 50 wt. %, based on the total weight of F, of at least one polymer (P) selected from the group consisting of poly(aryl ethersulfone) (PAES) polymer and polyetherimide (PEI) polymer, wherein the polymer (P) comprises at least one terminal group of formula (M1) or (M2)

OG Complex Work Unit Chemistry
wherein
R is Hor CH3,
X is a bond or (CH2)n with n ranging from 1 to 20, and wherein the number average molecular weight (Mn) of the polymer (P) is of less than 40,000 g/mol, as determined by gel permeation chromatography (GPC) using methylene chloride as a mobile phase and polystyrene standards,
at least one solvent,
at least one photoinitiator, and
at least one blocker compound.