US 12,103,874 B2
Ultraviolet light activated oxidation process for the reduction of organic carbon in semiconductor process water
Steve D. Sitkiewitz, Sebastopol, CA (US); Gary M. Carmignani, Occidental, CA (US); and Lee W. Frederick, Bodega Bay, CA (US)
Assigned to Evoqua Water Technologies LLC, Pittsburgh, PA (US)
Filed by Evoqua Water Technologies LLC, Pittsburgh, PA (US)
Filed on Aug. 30, 2021, as Appl. No. 17/461,262.
Application 17/461,262 is a continuation of application No. 16/739,071, filed on Jan. 9, 2020, abandoned.
Application 16/739,071 is a continuation of application No. 16/504,942, filed on Jul. 8, 2019, granted, now 10,550,020, issued on Feb. 4, 2020.
Application 16/504,942 is a continuation of application No. 14/169,928, filed on Jan. 31, 2014, granted, now 10,343,939, issued on Jul. 9, 2019.
Application 14/169,928 is a continuation in part of application No. 12/303,596, granted, now 8,652,336, issued on Feb. 18, 2014, previously published as PCT/US2007/070416, filed on Jun. 5, 2007.
Claims priority of provisional application 60/811,220, filed on Jun. 6, 2006.
Prior Publication US 2021/0387878 A1, Dec. 16, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. C02F 1/72 (2023.01); C02F 1/32 (2023.01); C02F 1/20 (2023.01); C02F 1/42 (2023.01); C02F 1/44 (2023.01); C02F 1/469 (2023.01); C02F 1/66 (2023.01); C02F 103/04 (2006.01); C02F 103/34 (2006.01)
CPC C02F 1/722 (2013.01) [C02F 1/325 (2013.01); C02F 1/20 (2013.01); C02F 1/42 (2013.01); C02F 1/441 (2013.01); C02F 1/444 (2013.01); C02F 1/4695 (2013.01); C02F 1/66 (2013.01); C02F 2103/04 (2013.01); C02F 2103/346 (2013.01); C02F 2209/001 (2013.01); C02F 2209/003 (2013.01); C02F 2209/20 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A water treatment system, comprising:
a source of water for semiconductor manufacturing;
a point of use fluidly connected downstream of the source of water; and
an advanced oxidation process system fluidly connected downstream from the source of water for semiconductor manufacturing, the advanced oxidation process system comprising:
a chemical reactor vessel;
a persulfate addition system fluidly connected to the chemical reactor vessel;
a light emitting device positioned within the chemical reactor vessel; and
a total organic carbon analyzer configured to receive an input signal of a total organic carbon measurement, the total organic carbon analyzer further configured to provide an output signal to control the persulfate addition system in response to the input signal.