a resin film including first holes;

a non-resin layer disposed on the resin film and including second holes corresponding to the first holes, each of the second holes of the non-resin layer including a side surface aligning with an upper side surface of a respective first hole of the first holes of the resin film such that each side surface of the non-resin layer and respective side surface of the resin film together form a single plane; and

a protective layer disposed on the non-resin layer and including third holes corresponding to the first holes, wherein

the protective layer includes:

a first portion disposed on a top surface of the non-resin layer; and

a second portion covering a side surface of the second holes of the non-resin layer.