US 11,778,720 B2
High efficiency laser-sustained plasma light source with collection of broadband radiation
Matthew Derstine, Los Gatos, CA (US); Ilya Bezel, Mountain View, CA (US); Anatoly Shchemelinin, Bozeman, MT (US); and Eugene Shifrin, Sunnyvale, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Sep. 22, 2020, as Appl. No. 17/28,902.
Application 17/028,902 is a continuation of application No. 15/187,590, filed on Jun. 20, 2016, granted, now 10,887,974.
Claims priority of provisional application 62/290,593, filed on Feb. 3, 2016.
Claims priority of provisional application 62/183,069, filed on Jun. 22, 2015.
Prior Publication US 2021/0022233 A1, Jan. 21, 2021
Int. Cl. H05G 2/00 (2006.01); H01S 3/131 (2006.01); H05H 1/46 (2006.01)
CPC H05G 2/008 (2013.01) [H01S 3/1312 (2013.01); H05H 1/46 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A system comprising:
a pump source configured to generate a pumping beam;
a gas containment structure for containing a gas;
an optical assembly including a multi-pass optical assembly and a collection assembly, wherein the multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma; and
wherein the collection assembly includes one or more collection optical elements wherein the one or more collection optical elements are configured to collect and direct at least a portion of broadband radiation emitted by the plasma back to the plasma, wherein the one or more collection optical elements of the collection assembly are interspersed between the one or more optical elements of the multi-pass optical assembly.