CPC H01S 5/423 (2013.01) [H01S 5/028 (2013.01); H01S 5/0282 (2013.01); H01S 5/0425 (2013.01); H01S 5/04254 (2019.08); H01S 5/04256 (2019.08); H01S 5/18311 (2013.01); H01S 5/18305 (2013.01); H01S 5/18377 (2013.01); H01S 2301/176 (2013.01)] | 20 Claims |
1. A space-conserving vertical cavity surface emitting laser (VCSEL) array, comprising:
a plurality of VCSELs including two adjacent VCSELs,
wherein each of the two adjacent VCSELs has an independent optical aperture;
an ohmic metal layer associated with the plurality of VCSELs; and
a protective layer over the ohmic metal layer,
wherein the protective layer includes a via to the ohmic metal layer,
wherein the via is shared between the two adjacent VCSELs of the plurality of VCSELs,
wherein the ohmic metal layer comprises separate portions with corresponding vias, and
wherein the via is one of the corresponding vias and included in one of the separate portions.
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