US 11,777,280 B2
Emitter array with shared via to an ohmic metal shared between adjacent emitters
Albert Yuen, Palo Alto, CA (US); and Ajit Vijay Barve, San Jose, CA (US)
Assigned to Lumentum Operations LLC, San Jose, CA (US)
Filed by Lumentum Operations LLC, Milpitas, CA (US)
Filed on Jul. 17, 2020, as Appl. No. 16/947,086.
Application 16/947,086 is a continuation of application No. 16/363,753, filed on Mar. 25, 2019, granted, now 10,720,758.
Claims priority of provisional application 62/649,366, filed on Mar. 28, 2018.
Prior Publication US 2020/0350746 A1, Nov. 5, 2020
Int. Cl. H01S 5/42 (2006.01); H01S 5/042 (2006.01); H01S 5/028 (2006.01); H01S 5/183 (2006.01)
CPC H01S 5/423 (2013.01) [H01S 5/028 (2013.01); H01S 5/0282 (2013.01); H01S 5/0425 (2013.01); H01S 5/04254 (2019.08); H01S 5/04256 (2019.08); H01S 5/18311 (2013.01); H01S 5/18305 (2013.01); H01S 5/18377 (2013.01); H01S 2301/176 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A space-conserving vertical cavity surface emitting laser (VCSEL) array, comprising:
a plurality of VCSELs including two adjacent VCSELs,
wherein each of the two adjacent VCSELs has an independent optical aperture;
an ohmic metal layer associated with the plurality of VCSELs; and
a protective layer over the ohmic metal layer,
wherein the protective layer includes a via to the ohmic metal layer,
wherein the via is shared between the two adjacent VCSELs of the plurality of VCSELs,
wherein the ohmic metal layer comprises separate portions with corresponding vias, and
wherein the via is one of the corresponding vias and included in one of the separate portions.