US 11,776,840 B2
Superstrate chuck, method of use, and method of manufacturing an article
Nilabh K. Roy, Austin, TX (US); Mario Johannes Meissl, Austin, TX (US); Seth J. Bamesberger, Austin, TX (US); Ozkan Ozturk, Round Rock, TX (US); and Byung-Jin Choi, Austin, TX (US)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Oct. 29, 2019, as Appl. No. 16/667,213.
Prior Publication US 2021/0125855 A1, Apr. 29, 2021
Int. Cl. H01L 21/687 (2006.01); B29C 33/00 (2006.01); B29C 35/08 (2006.01)
CPC H01L 21/68785 (2013.01) [B29C 33/00 (2013.01); B29C 35/0805 (2013.01); B29C 2033/0005 (2013.01); B29C 2035/0827 (2013.01); B29K 2995/0026 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A light transmitting chuck for retaining a superstrate or a template, the chuck comprising:
a chuck surface;
a channel recessed from the chuck surface, the channel including:
a channel surface parallel to the chuck surface;
a channel sidewall extending from the chuck surface to the channel surface;
a rounded edge between the chuck surface and the channel sidewall,
wherein the chuck surface transitions to the channel sidewall via the rounded edge of the channel; and
a land extending from the chuck surface, the land including:
a land surface parallel to the chuck surface;
a land sidewall extending from the land surface to the chuck surface; and
a rounded edge between the land surface and the sidewall,
wherein the land surface transitions to the land sidewall via the rounded edge of the land, and
wherein an intensity variation of light transmitting through the land and an area of the chuck adjacent to the land is reduced by the rounded edge of the land.