CPC H01L 21/6715 (2013.01) [B05C 11/10 (2013.01)] | 16 Claims |
1. An adapter for a liquid container of a supply system of a wet process module, for the treatment of substrates comprising
a container part configured for fastening to the container and a channel part configured for fastening to the supply system,
wherein the container part has a central opening and a fastening device configured for fastening the container part to the liquid container,
wherein the channel part comprises a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part, and
wherein a projection, through which the second channel portion extends, protrudes from the side of the channel part facing away from the container part.
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