US 11,776,827 B2
Adapter, connection device and supply system
Michael Braun, Garching (DE); Simon Schutzbach, Garching (DE); Kader Mekias, Garching (DE); Dinesh Vijayaraghavan, Garching (DE); and Orazio Monteserrato, Garching (DE)
Assigned to SUSS MICROTEC LITHOGRAPHY GMBH
Filed by SUSS MicroTec Lithography GmbH, Garching (DE)
Filed on Jul. 29, 2021, as Appl. No. 17/388,958.
Claims priority of application No. 2026157 (NL), filed on Jul. 29, 2020.
Prior Publication US 2022/0037168 A1, Feb. 3, 2022
Int. Cl. H01L 21/67 (2006.01); B05C 11/10 (2006.01)
CPC H01L 21/6715 (2013.01) [B05C 11/10 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An adapter for a liquid container of a supply system of a wet process module, for the treatment of substrates comprising
a container part configured for fastening to the container and a channel part configured for fastening to the supply system,
wherein the container part has a central opening and a fastening device configured for fastening the container part to the liquid container,
wherein the channel part comprises a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part, and
wherein a projection, through which the second channel portion extends, protrudes from the side of the channel part facing away from the container part.