US 11,776,822 B2
Wet cleaning of electrostatic chuck
Tuochuan Huang, Saratoga, CA (US); Gang Peng, Fremont, CA (US); David W. Groechel, Los Altos Hills, CA (US); Vijay D. Parkhe, San Jose, CA (US); Shinnosuke Kawaguchi, Tokyo (JP); and David Benjaminson, Campbell, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Appl. No. 17/51,071
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed May 2, 2019, PCT No. PCT/US2019/030477
§ 371(c)(1), (2) Date Oct. 27, 2020,
PCT Pub. No. WO2019/231609, PCT Pub. Date Dec. 5, 2019.
Claims priority of provisional application 62/677,593, filed on May 29, 2018.
Prior Publication US 2021/0249280 A1, Aug. 12, 2021
Int. Cl. H01L 21/67 (2006.01); B08B 3/12 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/67028 (2013.01) [B08B 3/12 (2013.01); H01L 21/6831 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A cleaning fixture that is configured to enable a substrate supporting surface of a substrate supporting member to be cleaned during a cleaning process, comprising:
a mounting plate comprising a recessed surface and a bottom surface, the recessed surface and bottom surface disposed parallel to one another and in separate planes, the recessed surface partially defining a recess formed in the mounting plate, the recess is further defined when a lower surface of a substrate supporting member is disposed adjacent to the bottom surface of the mounting plate;
shafts that extend from the bottom surface of the mounting plate, wherein the shafts and the mounting plate are inert to a chemical solution that is exposed to the substrate supporting surface of the substrate supporting member during the cleaning process;
a plenum is formed between the bottom surface and the recessed surface of the mounting plate and the lower surface of the substrate supporting member, the substrate supporting member configured to be coupled to the mounting plate;
a seal disposed between and in contact with the bottom surface of the mounting plate and the lower surface of the substrate supporting member, the seal partially sealing the plenum; and
a gas port formed through the mounting plate, wherein the gas port is fluidly coupled to the plenum.