CPC G06T 7/0006 (2013.01) [G01B 11/06 (2013.01); G06T 5/009 (2013.01); H01L 21/67253 (2013.01); G01B 2210/56 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/20208 (2013.01); G06T 2207/30148 (2013.01)] | 21 Claims |
1. A system for obtaining a measurement representative of a thickness of a layer on a substrate, comprising:
a support to hold a substrate for integrated circuit fabrication;
an optical sensor to capture a color image of at least a portion of the substrate held by the support; and
a controller configured to
receive the color image from the optical sensor,
perform a color correction on the color image to generate an adjusted color image having increased color contrast;
for a pixel of the adjusted color image, determine a coordinate of the pixel in a coordinate space of at least two dimensions including a first color channel and a second color channel from color data in the adjusted color image for the pixel, and
calculate a value representative of a thickness based on the coordinate of the pixel of the adjusted color image in the coordinate space.
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