CPC G03F 7/70875 (2013.01) [G03F 7/7085 (2013.01); G03F 7/70633 (2013.01)] | 14 Claims |
1. A method of determining an overlay value of a substrate, the method comprising:
obtaining temperature data that comprises data on the measured temperature at one or more positions on a substrate table after a substrate has been loaded onto the substrate table; and
determining, by a hardware computer, an overlay value of the substrate in dependence on the obtained temperature data over a measurement time period and in dependence on a variance of the obtained temperature data at the one or more positions.
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