US 11,774,869 B2
Method and system for determining overlay
Ruud Hendrikus Martinus Johannes Bloks, Helmond (NL); Hendrik Cornelis Anton Borger, Eindhoven (NL); Frederik Eduard De Jong, Veldhoven (NL); Johan Gertrudis Cornelis Kunnen, Weert (NL); Siebe Landheer, Eindhoven (NL); Chung-Hsun Li, Eindhoven (NL); Patricius Jacobus Neefs, Raamsdonksveer (NL); Georgios Tsirogiannis, Eindhoven (NL); and Si-Han Zeng, Eindhoven (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 17/599,302
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Jan. 17, 2020, PCT No. PCT/EP2020/051171
§ 371(c)(1), (2) Date Sep. 28, 2021,
PCT Pub. No. WO2020/207632, PCT Pub. Date Oct. 15, 2020.
Claims priority of application No. 19168502 (EP), filed on Apr. 10, 2019.
Prior Publication US 2022/0171299 A1, Jun. 2, 2022
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70875 (2013.01) [G03F 7/7085 (2013.01); G03F 7/70633 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method of determining an overlay value of a substrate, the method comprising:
obtaining temperature data that comprises data on the measured temperature at one or more positions on a substrate table after a substrate has been loaded onto the substrate table; and
determining, by a hardware computer, an overlay value of the substrate in dependence on the obtained temperature data over a measurement time period and in dependence on a variance of the obtained temperature data at the one or more positions.