CPC G03F 7/7085 (2013.01) [C23C 14/34 (2013.01); C23C 14/5826 (2013.01); C23C 16/45525 (2013.01); G03F 7/70341 (2013.01)] | 20 Claims |
1. An image sensor for immersion lithography, the image sensor comprising:
a grating comprising protrusions;
an absorber layer on the grating, the absorber layer configured to absorb radiation; and
a liquidphobic coating at an upper surface of the image sensor;
a protective layer between the absorber layer and the liquidphobic layer, the protective layer being less reactive than the absorber layer to an immersion liquid, and
wherein the protective layer has a first thickness perpendicular to a top of the protrusions and a second thickness perpendicular to a side of the protrusions, the first thickness being at least half and at most twice the second thickness.
|