US 11,774,828 B2
Supercontinuum radiation source and associated metrology devices
Sebastian Thomas Bauerschmidt, Wendelstein (DE); Peter Maximilian Götz, Bavaria (DE); and Patrick Sebastian Uebel, Marloffstein (DE)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on May 4, 2021, as Appl. No. 17/307,217.
Claims priority of application No. 20175307 (EP), filed on May 19, 2020.
Prior Publication US 2021/0364885 A1, Nov. 25, 2021
Int. Cl. G02F 1/35 (2006.01); H01S 3/00 (2006.01); H01S 3/067 (2006.01); G03F 9/00 (2006.01)
CPC G02F 1/3528 (2021.01) [G03F 9/7034 (2013.01); H01S 3/0057 (2013.01); H01S 3/06741 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A radiation source comprising:
a modulator configured to modulate pump laser radiation comprising a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide one or more bursts of the pulses, the one or more bursts having a temporal delay longer than a temporal delay between successive individual pump pulses; and
a hollow-core photonic crystal fiber configured to receive the modulated pump laser radiation having the one or more bursts and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate broadband radiation.