US 11,774,671 B2
Hollow-core photonic crystal fiber based optical component for broadband radiation generation
Patrick Sebastian Uebel, Marloffstein (DE); Peter Maximilian Götz, Bavaria (DE); Sebastian Thomas Bauerschmidt, Wendelstein (DE); Coen Hubertus Matheus Baltis, Eindhoven (NL); and Janneke Ravensbergen, Würzburg (DE)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Oct. 22, 2020, as Appl. No. 17/77,756.
Claims priority of application No. 19204985 (EP), filed on Oct. 24, 2019; and application No. 19217381 (EP), filed on Dec. 18, 2019.
Prior Publication US 2021/0124112 A1, Apr. 29, 2021
Int. Cl. G02B 6/02 (2006.01); C03B 37/15 (2006.01); F21V 8/00 (2006.01); G03F 7/00 (2006.01); G03F 9/00 (2006.01)
CPC G02B 6/02328 (2013.01) [C03B 37/15 (2013.01); G02B 6/0096 (2013.01); G02B 6/02347 (2013.01); G03F 7/7085 (2013.01); G03F 9/7034 (2013.01); G03F 9/7065 (2013.01); C03B 2203/16 (2013.01); C03B 2203/42 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An optical component, comprising:
a hollow-core photonic crystal fiber comprising a hollow core forming a non-solid space, internal capillaries for guiding radiation and located around the hollow core, and an outer capillary sheathing the internal capillaries; and
at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section,
wherein internal capillaries of the hollow-core photonic crystal fiber are collapsed at an end of the hollow-core photonic crystal fiber such that, along a direction moving toward the end, the capillaries reduce in cross-sectional dimension while a region of the hollow core increases in cross-sectional dimension.