US 11,774,492 B2
Test system including active thermal interposer device
Samer Kabbani, Laguna Niguel, CA (US); Paul Ferrari, Mission Viejo, CA (US); Ikeda Hiroki, Kukishi Saitama (JP); Kiyokawa Toshiyuki, Kukishi Saitama (JP); Gregory Cruzan, Anaheim, CA (US); Karthik Ranganathan, Foothill Ranch, CA (US); Todd Berk, Rancho Santa Margarita, CA (US); Ian Williams, Huntington Beach, CA (US); Mohammad Ghazvini, Laguna Niguel, CA (US); and Tom Jones, San Jose, CA (US)
Assigned to Advantest Test Solutions, Inc., San Jose, CA (US)
Filed by Advantest Test Solutions, Inc., San Jose, CA (US)
Filed on Jun. 15, 2022, as Appl. No. 17/841,491.
Application 17/841,491 is a continuation of application No. 17/531,649, filed on Nov. 19, 2021, granted, now 11,567,119.
Claims priority of provisional application 63/121,532, filed on Dec. 4, 2020.
Prior Publication US 2022/0326299 A1, Oct. 13, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 31/28 (2006.01); G01R 1/04 (2006.01)
CPC G01R 31/2875 (2013.01) [G01R 1/0458 (2013.01); G01R 31/2863 (2013.01); G01R 31/2867 (2013.01); G01R 31/2874 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A testing device for testing a device under test (DUT), said testing device comprising:
a cold plate;
an active thermal interposer device disposed between said cold plate and said DUT, said active thermal interposer including a plurality of heating zones; and
a thermal controller coupled to said cold plate and said active thermal interposer device, said thermal controller operable to control said cold plate and to individually control each of said plurality of heating zones of said active thermal interposer device to heat and cool different regions of said DUT to different temperatures.