CPC G01R 31/2875 (2013.01) [G01R 1/0458 (2013.01); G01R 31/2863 (2013.01); G01R 31/2867 (2013.01); G01R 31/2874 (2013.01)] | 23 Claims |
1. A testing device for testing a device under test (DUT), said testing device comprising:
a cold plate;
an active thermal interposer device disposed between said cold plate and said DUT, said active thermal interposer including a plurality of heating zones; and
a thermal controller coupled to said cold plate and said active thermal interposer device, said thermal controller operable to control said cold plate and to individually control each of said plurality of heating zones of said active thermal interposer device to heat and cool different regions of said DUT to different temperatures.
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