CPC G01H 11/08 (2013.01) [G01N 29/07 (2013.01); G01S 15/02 (2013.01); H01G 5/00 (2013.01); H10N 30/302 (2023.02); H10N 30/852 (2023.02); B81B 3/0021 (2013.01)] | 20 Claims |
1. A micromachined ultrasonic transducer (MUT), comprising:
a first electrode having at least a first symmetric vibrational mode corresponding to a first frequency and at least a first asymmetric vibrational mode corresponding to a second frequency,
the first frequency and the second frequency being the same order and being different from each other,
wherein a vibrational frequency of the MUT can be tuned by switching between a symmetric vibrational mode and an asymmetric vibrational mode of the same order.
|