US 11,774,280 B2
Imaging devices having piezoelectric transceivers
Sandeep Akkaraju, Wellesley, MA (US); Haesung Kwon, Austin, TX (US); and Brian Bircumshaw, Oakland, CA (US)
Assigned to EXO IMAGING, INC., Santa Clara, CA (US)
Filed by Exo Imaging, Inc., Redwood City, CA (US)
Filed on Mar. 17, 2022, as Appl. No. 17/697,837.
Application 17/697,837 is a continuation of application No. 17/180,308, filed on Feb. 19, 2021, granted, now 11,313,717.
Application 17/180,308 is a continuation of application No. 16/833,333, filed on Mar. 27, 2020, granted, now 10,969,270, issued on Apr. 6, 2021.
Application 16/833,333 is a continuation of application No. 15/951,121, filed on Apr. 11, 2018, granted, now 10,648,852, issued on May 12, 2020.
Prior Publication US 2022/0205836 A1, Jun. 30, 2022
Int. Cl. G01S 15/00 (2020.01); G01N 29/00 (2006.01); G01H 11/08 (2006.01); G01S 15/02 (2006.01); G01N 29/07 (2006.01); H01G 5/00 (2006.01); H10N 30/30 (2023.01); H10N 30/85 (2023.01); B81B 3/00 (2006.01)
CPC G01H 11/08 (2013.01) [G01N 29/07 (2013.01); G01S 15/02 (2013.01); H01G 5/00 (2013.01); H10N 30/302 (2023.02); H10N 30/852 (2023.02); B81B 3/0021 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A micromachined ultrasonic transducer (MUT), comprising:
a first electrode having at least a first symmetric vibrational mode corresponding to a first frequency and at least a first asymmetric vibrational mode corresponding to a second frequency,
the first frequency and the second frequency being the same order and being different from each other,
wherein a vibrational frequency of the MUT can be tuned by switching between a symmetric vibrational mode and an asymmetric vibrational mode of the same order.