US 11,774,244 B2
3-axis gyroscope with rotational vibration rejection
Jeffrey A. Gregory, Malden, MA (US); Charles Blackmer, Londonderry, NH (US); Tyler Adam Dunn, Westford, MA (US); Eugene Oh Hwang, Long Beach, CA (US); Jinbo Kuang, Acton, MA (US); Kemiao Jia, Tolland, CT (US); Laura Cornelia Popa, Madison, NJ (US); Igor P. Prikhodko, Buzzards Bay, MA (US); and Erdinc Tatar, Burlington, MA (US)
Assigned to Analog Devices, Inc., Wilmington, MA (US)
Filed by Analog Devices, Inc., Wilmington, MA (US)
Filed on Oct. 29, 2021, as Appl. No. 17/515,271.
Application 17/515,271 is a continuation of application No. 16/894,717, filed on Jun. 5, 2020, granted, now 11,193,771.
Prior Publication US 2022/0057210 A1, Feb. 24, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01C 19/5747 (2012.01); G01C 19/5712 (2012.01); G01C 19/5719 (2012.01); G01C 19/574 (2012.01)
CPC G01C 19/5747 (2013.01) [G01C 19/574 (2013.01); G01C 19/5712 (2013.01); G01C 19/5719 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A gyroscope, comprising:
a first plurality of proof masses arranged linearly in a first plane and configured for detection of motion about a first axis of rotation, the first plurality of proof masses comprising at least three proof masses configured to translate along a first axis of the first plane;
a second plurality of proof masses arranged linearly in the first plane and configured for detection of motion about a second axis of rotation, the second plurality of proof masses comprising at least three proof masses configured to translate along a second axis perpendicular to the first axis;
a first drive array coupled to the first plurality of proof masses and configured to cause translation of the first plurality of proof masses along the first axis of the first plane by displacement of the first drive array along the second axis perpendicular to the first axis; and
a second drive array coupled to the second plurality of proof masses, the second drive array configured to cause translation of the second plurality of proof masses along the second axis by displacement of the second drive array along the second axis.