US 11,774,236 B2
Alignment of a measurement optical system and a sample under test
James Burge, Tucson, AZ (US)
Assigned to ARIZONA OPTICAL METROLOGY LLC, Tucson, AZ (US)
Appl. No. 17/923,777
Filed by ARIZONA OPTICAL METROLOGY LLC, Tucson, AZ (US)
PCT Filed Feb. 7, 2022, PCT No. PCT/US2022/015409
§ 371(c)(1), (2) Date Nov. 7, 2022,
PCT Pub. No. WO2022/170160, PCT Pub. Date Aug. 11, 2022.
Claims priority of provisional application 63/252,510, filed on Oct. 5, 2021.
Claims priority of provisional application 63/146,685, filed on Feb. 7, 2021.
Prior Publication US 2023/0123150 A1, Apr. 20, 2023
Int. Cl. G01B 11/02 (2006.01); G01B 11/24 (2006.01); G02B 5/13 (2006.01); G02B 7/182 (2021.01)
CPC G01B 11/2441 (2013.01) [G02B 5/13 (2013.01); G02B 7/1827 (2013.01)] 30 Claims
OG exemplary drawing
 
1. A metrology platform comprising:
a metrology frame having a reference axis and comprising:
a carriage structured to include:
a housing base that contains a set of fiducial structures and that is dimensioned to receive and removably hold thereat an optical workpiece such that at least one of a first spatial position and a first spatial orientation of a first reference point of the optical workpiece is in a first pre-defined dimensional relationship with respect to the set of fiducial structures; and
at least one retroreflector holder affixed to the housing base and configured to receive and removably hold thereat at least one optical retroreflector structure such that at least one of a second spatial position and a second spatial orientation of a second reference point of the at last one optical retroreflector structure is in a second pre-defined dimensional relationship with respect to the set of fiducial structures,
wherein the at least one optical retroreflector structure comprises at least one optical retroreflector;
and
a hologram carried by or in an optically-transparent substrate and having at least one primary holographic region defined to form, in transmission therethrough, at least one corresponding spatially-converging optical wavefront when irradiated with an input beam of light,
wherein the metrology frame and the hologram are spatially aligned such that light corresponding to the at least one spatially converging optical wavefront formed by the at least one primary holographic region enters an aperture of the at least one optical retroreflector.