US 11,773,849 B2
Vacuum pump, scroll pump, and manufacturing method for such
Michael Willig, Lahnau (DE); Jan Hofmann, Gruenbeg (DE); Jonas Becker, Bischoffen (DE); Gernot Bernhardt, Huettenberg (DE); Verena Wangorsch, Wetzlar (DE); Stefan Kallenborn, Wetzlar (DE); Wolfgang Soehngen, Waldsolms (DE); Heiko Schaefer, Solms-Niederbiel (DE); Erhard Harapat, Asslar (DE); and Lars Pauli, Solms (DE)
Assigned to PFEIFFER VACUUM GmbH, Asslar (DE)
Filed by PFEIFFER VACUUM GMBH, Asslar (DE)
Filed on Oct. 6, 2020, as Appl. No. 17/63,912.
Claims priority of application No. 19201745 (EP), filed on Oct. 7, 2019; and application No. 19201749 (EP), filed on Oct. 7, 2019.
Prior Publication US 2021/0102536 A1, Apr. 8, 2021
Int. Cl. F04C 18/02 (2006.01); F04C 29/04 (2006.01); F04C 25/02 (2006.01)
CPC F04C 18/0215 (2013.01) [F04C 25/02 (2013.01); F04C 29/04 (2013.01); F04C 2220/10 (2013.01); F04C 2270/18 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A scroll pump, comprising:
at least one pressure sensor integrated into the scroll pump; and
a cooling device,
wherein the at least one pressure sensor is disposed in a cooling air flow of the cooling device,
wherein the at least one pressure sensor is disposed at least substantially at a start of the cooling air flow adjacent to the cooling device,
wherein the at least one pressure sensor is positioned within an air guide hood of the scroll pump, and
wherein a cable is attached to the at least one pressure sensor and passes through the air guide hood.