US 11,773,505 B2
Reaction chamber
Gang Xu, Beijing (CN)
Assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing (CN)
Appl. No. 17/802,843
Filed by BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing (CN)
PCT Filed Feb. 5, 2021, PCT No. PCT/CN2021/075520
§ 371(c)(1), (2) Date Aug. 26, 2022,
PCT Pub. No. WO2021/175089, PCT Pub. Date Sep. 10, 2021.
Claims priority of application No. 202010152523.3 (CN), filed on Mar. 6, 2020.
Prior Publication US 2023/0028116 A1, Jan. 26, 2023
Int. Cl. C23C 16/40 (2006.01); C30B 25/08 (2006.01); C23C 16/455 (2006.01); C23C 16/507 (2006.01); C30B 25/14 (2006.01); C30B 30/02 (2006.01)
CPC C30B 25/08 (2013.01) [C23C 16/45565 (2013.01); C23C 16/507 (2013.01); C30B 25/14 (2013.01); C30B 30/02 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A reaction chamber comprising:
a chamber body that is grounded;
an upper cover including an electrode, the chamber body being connected to the upper cover through an insulation member, the chamber body and the upper cover forming an inner chamber, and a through-hole that is communicated with the inner chamber being formed at the upper cover; and
a gas inlet mechanism including:
a first insulation block partially arranged in the through-hole, an accommodation space being arranged on a side of the first insulation block away from the inner chamber, the first insulation block including a first gas inlet hole, an end of the first gas inlet hole being communicated with the inner chamber;
a second insulation block arranged in the accommodation space and including a second gas inlet hole, the other end of the first gas inlet hole being communicated with the second gas inlet hole, in an axial direction of the through-hole, a projection the first gas inlet hole being outside a projection of the second gas inlet hole;
a gas inlet pipe arranged at an opening of the accommodation space and located above the second insulation block, the gas inlet pipe being communicated with the second insulation block; and
a flange part body that is at least partially arranged in the through-hole;
wherein:
a gas inlet groove is arranged on an outer side surface of the second insulation block;
the gas inlet groove and an inner wall of the accommodation space form the second gas inlet hole;
a first groove is arranged on a side of the second insulation block facing the inner chamber;
the first groove and the inner wall of the accommodation space form a first gas chamber; and
the first gas inlet hole and the second gas inlet hole are communicated with the first gas chamber.