US 11,772,261 B2
Compact direct drive spindle
Robert Caveney, Windham, NH (US)
Assigned to BROOKS AUTOMATION US, LLC, Chelmsford, MA (US)
Filed by BROOKS AUTOMATION US, LLC, Chelmsford, MA (US)
Filed on Oct. 17, 2022, as Appl. No. 18/47,170.
Application 17/468,181 is a division of application No. 16/702,403, filed on Dec. 3, 2019, granted, now 11,110,598.
Application 18/047,170 is a continuation of application No. 17/468,181, filed on Sep. 7, 2021, abandoned.
Application 16/702,403 is a continuation of application No. 15/695,744, filed on Sep. 5, 2017, granted, now 10,493,620, issued on Dec. 3, 2019.
Application 15/695,744 is a continuation of application No. 14/941,888, filed on Nov. 16, 2015, granted, now 9,751,209, issued on Sep. 5, 2017.
Application 14/941,888 is a continuation of application No. 13/547,786, filed on Jul. 12, 2012, granted, now 9,186,799, issued on Nov. 17, 2015.
Claims priority of provisional application 61/510,819, filed on Jul. 22, 2011.
Claims priority of provisional application 61/507,276, filed on Jul. 13, 2011.
Prior Publication US 2023/0065160 A1, Mar. 2, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B25J 9/00 (2006.01); B25J 9/12 (2006.01); B25J 18/04 (2006.01); H01L 21/677 (2006.01); B25J 11/00 (2006.01)
CPC B25J 9/126 (2013.01) [B25J 11/0095 (2013.01); B25J 18/04 (2013.01); H01L 21/67742 (2013.01); B25J 9/0009 (2013.01); Y10S 901/23 (2013.01); Y10T 74/20317 (2015.01)] 16 Claims
OG exemplary drawing
 
1. A sealed actuator comprising:
stacked motor modules, each motor module having:
a motor module housing,
a motor stator attached to the motor module housing,
a motor rotor in communication with the motor stator, and
a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor;
where the motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.