| CPC B24B 37/24 (2013.01) | 18 Claims |
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1. A method of forming a polishing pad, comprising sequential repetitions of:
dispensing droplets of a porosity-forming agent and droplets of a polymer precursor formulation onto a surface according to a predetermined droplet dispense pattern, the polymer precursor formulation comprising a precursor material that is formed from a first resin precursor component, a second resin precursor component, and a first curing agent; and
at least partially polymerizing the dispensed droplets of the polymer precursor formulation to form a layer of structural material, wherein
the dispensed droplets of the porosity-forming agent form a plurality of porosity-forming agent containing features,
the plurality of porosity-forming agent containing features are distributed across an X-Y plane parallel to a supporting surface of the polishing pad; and
at least portions of the layer of structural material are interposed between individual ones of the porosity-forming agent containing features, wherein:
a first repetition of the dispensing droplets of the porosity-forming agent and droplets of the polymer precursor formulation forms a first layer of structural material containing first regions formed from the precursor material, the first regions of the first layer of structure material are disposed on the surface and between adjacently positioned porosity-forming agent containing features; and
a second repetition of the dispensing droplets of the porosity-forming agent and droplets of the polymer precursor formulation forms a second layer of structural material containing second regions formed from the precursor material, the second regions of the second layer of structure material are disposed on the surface of the first layer of structural material and between adjacently positioned porosity-forming features.
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