CPC B01D 71/58 (2013.01) [B01D 69/12 (2013.01); B01D 71/26 (2013.01); B01D 71/36 (2013.01); C02F 1/44 (2013.01); C07C 229/16 (2013.01); C08F 255/02 (2013.01); C08F 259/08 (2013.01); C02F 2101/203 (2013.01); C02F 2101/22 (2013.01); C02F 2103/346 (2013.01)] | 19 Claims |
1. A filter material comprising a polycarboxyl ligand, wherein the filter material is configured to be used in conjunction with a microelectronic fabrication system for providing a metal- or metal ion-depleted liquid composition;
wherein the polycarboxyl ligands are covalently bound to the filter material through at least one linkage which is other than through a carboxyl group;
and wherein the filter material is modified by halogenation or haloalkylation to provide a surface-reactive chemistry for attachment of the polycarboxyl ligands if the filter material is not inherently amine-reactive.
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