US 11,772,055 B2
Ligand-modified filter and methods for reducing metals from liquid compositions
James Hamzik, North Billerica, MA (US); Jad A. Jaber, Westford, MA (US); Nicholas J. Filipancic, Medford, MA (US); and Justin Brewster, North Billerica, MA (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Feb. 24, 2021, as Appl. No. 17/184,273.
Claims priority of provisional application 62/981,351, filed on Feb. 25, 2020.
Prior Publication US 2021/0260537 A1, Aug. 26, 2021
Int. Cl. B01D 69/12 (2006.01); B01D 71/26 (2006.01); B01D 71/36 (2006.01); B01D 71/58 (2006.01); C02F 101/20 (2006.01); C02F 101/22 (2006.01); C02F 103/34 (2006.01); C02F 1/44 (2023.01); C07C 229/16 (2006.01); C08F 255/02 (2006.01); C08F 259/08 (2006.01)
CPC B01D 71/58 (2013.01) [B01D 69/12 (2013.01); B01D 71/26 (2013.01); B01D 71/36 (2013.01); C02F 1/44 (2013.01); C07C 229/16 (2013.01); C08F 255/02 (2013.01); C08F 259/08 (2013.01); C02F 2101/203 (2013.01); C02F 2101/22 (2013.01); C02F 2103/346 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A filter material comprising a polycarboxyl ligand, wherein the filter material is configured to be used in conjunction with a microelectronic fabrication system for providing a metal- or metal ion-depleted liquid composition;
wherein the polycarboxyl ligands are covalently bound to the filter material through at least one linkage which is other than through a carboxyl group;
and wherein the filter material is modified by halogenation or haloalkylation to provide a surface-reactive chemistry for attachment of the polycarboxyl ligands if the filter material is not inherently amine-reactive.