| CPC H10D 1/692 (2025.01) | 17 Claims |
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1. A capacitor comprising:
a substrate;
a capacitor structure on the substrate, the capacitor structure including:
a single lower electrode;
a single upper electrode; and
a dielectric film between the single lower electrode and the single upper electrode, the dielectric film including a plurality of via holes;
a single first terminal electrode in the plurality of via holes, in direct contact with the dielectric film, and electrically connected to the single lower electrode;
a single second terminal electrode electrically connected to the single upper electrode; and
a protective layer on the single lower electrode, the dielectric film, and the single upper electrode,
wherein a width of the plurality of via holes is less than or equal to twice a film thickness of the first terminal electrode, wherein
the single first terminal electrode comprises a plurality of protrusions filling each of the plurality of via holes.
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