US 12,432,819 B2
Substrate fixing device
Akihiro Kuribayashi, Nagano (JP); and Riku Nishikawa, Nagano (JP)
Assigned to SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano (JP)
Filed by SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano (JP)
Filed on Jan. 28, 2021, as Appl. No. 17/160,918.
Claims priority of application No. 2020-014638 (JP), filed on Jan. 31, 2020.
Prior Publication US 2021/0243845 A1, Aug. 5, 2021
Int. Cl. H05B 3/06 (2006.01); H01L 21/683 (2006.01); H05B 3/00 (2006.01)
CPC H05B 3/06 (2013.01) [H01L 21/6833 (2013.01); H05B 3/0047 (2013.01); H05B 2203/032 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A substrate fixing device comprising:
an electrostatic chuck that is configured to adsorb and retain an object thereon, and comprising a base body formed of a dielectric material and on which the object is mounted, and an electrostatic electrode that is provided in the base body;
a base plate on which the electrostatic chuck is mounted with a first face of the base plate facing a first face of the base body, the base plate having a plurality of through holes each exposing the first face of the base body,
wherein
a plurality of recesses are formed in the first face of the base body, each of the plurality of recesses communicates with a respective one of the plurality of through holes, and each of the plurality of recesses includes a side face and a bottom face formed of the dielectric material, where the bottom face is exposed to and faces the respective one of the plurality of through holes,
the substrate fixing device further comprises a plurality of optical fibers, each of the plurality of optical fibers is disposed in a respective one of the plurality of through holes so laser light emitted from the plurality of optical fibers is radiated directly onto the dielectric material forming the bottom face and the side face of each of the plurality of recesses, and
a front end of each of the plurality of optical fibers that faces the base body is disposed within the respective one of the plurality of through holes and does not project past the first face of the base plate toward the base body.