US 12,431,372 B2
Heating device, substrate processing system, and heating method
Takashi Sugimoto, Yamanashi (JP); Hiroyuki Takahashi, Yamanashi (JP); and Shinya Okano, Yamanashi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Jun. 14, 2021, as Appl. No. 17/347,316.
Claims priority of application No. 2020-106988 (JP), filed on Jun. 22, 2020.
Prior Publication US 2021/0398830 A1, Dec. 23, 2021
Int. Cl. H01L 21/67 (2006.01); H01L 21/324 (2006.01)
CPC H01L 21/67201 (2013.01) [H01L 21/324 (2013.01); H01L 21/67115 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A heating device for heating a substrate before transferring the substrate to a processing device using a transfer mechanism, the transfer mechanism being disposed outside the heating device to hold and transfer the substrate between the heating device and the processing device, the heating device comprising:
a support unit configured to support the substrate; and
a heating unit, the heating unit including:
a base;
light emitting elements mounted on a lower surface of the base, the light emitting elements configured to emit light to individually heat divided regions of the substrate in a plan view while the substrate is supported by the support unit; and
a control board mounted on an upper surface of the base that is opposite the lower surface of the base and having a memory that is configured to store first light output values of a first subset of the light emitting elements that correspond to first regions of the substrate configured to contact substrate holding portions of the transfer mechanism and second light output values of a second subset of the light emitting elements that correspond to second regions of the substrate that are not configured to contact the transfer mechanism, the control board configured to control light outputs of the light emitting elements based on the first light output values and the second light output values stored in the memory,
wherein, the control board is configured to control, among the first subset of the light emitting elements, light outputs of the first subset of the light emitting elements that correspond to the first regions of the substrate in contact with the substrate holding portions of the transfer mechanism to be higher than light outputs of the second subset of the light emitting elements that correspond to the second regions of the substrate that are not in contact with the substrate holding portions of the transfer mechanism based on the first light output values and the second light output values stored in the memory.