| CPC H01L 21/67092 (2013.01) [B23K 26/38 (2013.01); H01L 21/6836 (2013.01); H01L 2221/68327 (2013.01)] | 6 Claims |
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1. A processing apparatus for removing a ring-shaped reinforcing portion in a projecting shape from a wafer having the reinforcing portion formed in a projecting shape on an undersurface part corresponding to a peripheral surplus region, the processing apparatus comprising:
a wafer cassette table mounted with a wafer cassette housing a plurality of wafers;
a wafer unloading mechanism configured to unload the wafer from the wafer cassette mounted on the wafer cassette table;
a wafer table configured to support a top surface side of the wafer unloaded by the wafer unloading mechanism;
a frame housing mechanism configured to house a plurality of ring-shaped frames in which an opening portion for housing the wafer is formed;
a frame unloading mechanism configured to unload a frame from the frame housing mechanism;
a frame table configured to support the frame unloaded by the frame unloading mechanism;
a tape attaching mechanism disposed above the frame table and configured to attach a tape to the frame;
a tape-attached frame transporting mechanism configured to transport the frame to which the tape is attached to the wafer table, position the opening portion of the frame at the undersurface of the wafer supported by the wafer table, and mount the tape-attached frame on the wafer table;
a tape compression-bonding mechanism configured to compression-bond the tape of the tape-attached frame to the undersurface of the wafer;
a frame unit unloading mechanism configured to unload, from the wafer table, a frame unit in which the tape of the tape-attached frame and the undersurface of the wafer are compression-bonded to each other by the tape compression-bonding mechanism, and temporarily place the frame unit on a temporary placement table;
a reinforcing portion removing mechanism configured to cut and remove the ring-shaped reinforcing portion from the wafer of the frame unit mounted on the temporary placement table;
a no-ring unit unloading mechanism configured to unload the no-ring unit from which the ring-shaped reinforcing portion is removed from the reinforcing portion removing mechanism; and
a frame cassette table mounted with a frame cassette configured to house the no-ring unit unloaded by the no-ring unit unloading mechanism;
the reinforcing portion removing mechanism including a laser beam irradiating unit configured to form a cutting groove by applying a laser beam to a base of the ring-shaped reinforcing portion formed on a periphery of the wafer, a first raising and lowering table configured to hold and raise the frame unit temporarily placed on the temporary placement table, and position the frame unit at the laser beam irradiating unit, and a separating unit configured to separate the ring-shaped reinforcing portion from the cutting groove;
the separating unit including an ultraviolet ray irradiating unit configured to reduce an adhesive force of the tape by irradiating a tape part corresponding to the cutting groove with an ultraviolet ray, a second raising and lowering table configured to suck and hold an inside of the wafer while exposing the ring-shaped reinforcing portion to a periphery of the second raising and lowering table, a separator configured to separate the ring-shaped reinforcing portion by making tops having a wedge act on a periphery of the ring-shaped reinforcing portion, and a discarding unit onto which the separated ring-shaped reinforcing portion is discarded, wherein:
the second raising and lowering table includes two kinds or more of table heads having an outside diameter corresponding to an inside diameter of the reinforcing portion of the wafer, and a table head is detachably fitted to a raising and lowering mechanism,
the separating unit includes a detector configured to detect whether or not a kind of table head input to a control unit coincides with a kind of table head actually fitted, and
the detector detects whether or not the outside diameter of the table head which outside diameter is obtained by bringing the tops of the separator into contact with a periphery of the table head coincides with the outside diameter of the table head which outside diameter is input to the control unit.
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