US 12,431,358 B2
Methods and materials for enhanced barrier performance and reduced via resistance
Lu Chen, Cupertino, CA (US); Seshadri Ganguli, Sunnyvale, CA (US); Sang Ho Yu, Cupertino, CA (US); and Feng Chen, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 16, 2020, as Appl. No. 17/072,806.
Prior Publication US 2022/0122923 A1, Apr. 21, 2022
Int. Cl. H01L 21/285 (2006.01); B22F 1/145 (2022.01); H01L 21/768 (2006.01); H01L 23/532 (2006.01)
CPC H01L 21/28562 (2013.01) [B22F 1/145 (2022.01); H01L 21/76843 (2013.01); H01L 23/53238 (2013.01); H01L 23/53252 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of passivating a metal surface, the method comprising exposing the metal surface to a metal complex to form a passivated metal surface, the metal complex comprising a metal atom and an organic ligand with at least three carbon atoms and a triple bond that eta bonds with the metal atom.